LIBROS DEL AUTOR: f h p m habraken

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  • LPCVD Silicon Nitride and Oxynitride Films
    F.H.P.M. Habraken
    The present book collects a broad overview of chemical and physical char­ acteristics of silicon oxynitrides. Special emphasis is put on the way in which these properties influence the electrical characteristics and behaviour of this important material. The results presented here were obtained in an ex­ tended European research cooperation in the fram...
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