LIBROS DEL AUTOR: elizabeth a chitwood

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  • Electrical Activation Studies of Silicon Implanted AlxGa1-xN and Coimplanted GaN
    Elizabeth A. Chitwood
    A comprehensive study of the electrical activation of silicon implanted AlxGa1-xN was performed as a function ion dose, anneal temperature, and aluminum mole fraction. Also, GaN coimplanted with silicon and nitrogen was investigated. Room temperature Hall effect measurements were used to determine carrier concentration and mobility. All the samples had a 500 Å encapsulant of Al...
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