LIBROS DEL AUTOR: chris r kleijn

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  • Modeling of Chemical Vapor Deposition of Tungsten Films
    Chris R. Kleijn / Christoph Werner
    Semiconductor equipment modeling has in recent years become a field of great interest, because it offers the potential to support development and optimization of manufacturing equipment and hence reduce the cost and improve the quality of the reactors. This book is the result of two parallel lines of research dealing with the same subject - Modeling o...
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    67,01 €