LIBROS DEL AUTOR: aarthi venkateshan

1 resultados para LIBROS DEL AUTOR: aarthi venkateshan

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  • Manufacturable Process/Tool for high-κ/metal gate
    Aarthi Venkateshan / Rajendra Singh
    Off state leakage current related power dominates the CMOS heat dissipation problem of state of the art silicon integrated circuits. In this study, this issue has been addressed in terms of a low-cost single wafer processing (SWP) technique using a single tool for the fabrication of high-κ dielectric gate stacks for sub-45 nm CMOS. A system for monolayer photoassisted depositio...
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    97,45 €